MATR 42500 - Scanning Electron Microscopy And Energy Dispersive X-Ray Spectroscopy

Theory and practice of scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDX). Some discussion of wavelength dispersive methods.

Cr. 2 or 3.
Student Learning Outcomes
1. Understand SEM theory and architecture: electron sources; beam characteristics (voltage etc) and their measurement; beam manipulation; different types of SEM machines and their characteristics; and BSE, SE theory, detectors, and characteristics.
2. Understand X-ray fluorescence theory and equipment (EDS, WDS): atomic structure and characteristic xrays; other aspects of the xray spectrum; xray detection technologies and principles.
3. Use practical skills: sample prep including polishing, etching, fracturing, mounting, and coating; the chamber and its limitations; accessory devices and how they are mounted; optimizing images; using xrays for spectra and analysis at points, areas, lines.